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Plasma-Therm Acquires OEM Group’s Dry Process Equipment Business

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Plasma-Therm announced its acquisition of OEM Group’s dry process equipment business. With the acquisition, Plasma-Therm has acquired all original OEM licenses and intellectual property rights for SFI Endeavor, AG Heatpulse, MRC Eclipse, and Tegal brand equipment.

Plasma-Therm will continue to support existing customers with spare parts and upgrades while offering new and refurbished tools to the wider market.

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A gas made up of electrons and ions.
Businesssemiconductorsmergers & acquisitionsacquisitionsplasmaplasma processingPlasma-ThermOEM Group

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