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DataRay Inc. - ISO 11146-Compliant Laser Beam Profilers

$5M Metrology Order

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Rudolph Technologies Inc. of Flanders, N.J., a process characterization equipment and software provider, has received $5 million worth of orders from a long-standing customer for its S3000A and MetaPulse III thin-film metrology systems. Expected to ship to multiple fabs in the first half of 2010, the systems will be used in copper metrology applications, including copper seed/barrier, electrochemical deposition and chemical mechanical polishing. The MetaPulse III can directly measure thickness and other metrology parameters on product wafers in the active device regions for accurate process...Read full article

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    Published: April 2010
    Glossary
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    Businesschemical mechanical polishingcoppercopper metrologyelectrochemical depositionlight speedMetaPulse IIImetrologymetrology orderRudolph TechnologiesS3000ASoftwareTest & Measurementthickness measurementthin film metrology systemthin filmsWafers

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