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Advanced Instrumentation Benefits Microelectronics Manufacturing

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Sean Bergman, Coherent Inc., and Marty Hemenway, Electro Scientific Industries Inc.

Laser-based processing has been a key enabling technology in improving the quality and reducing the size of devices such as cell phones, laptop computers, digital cameras and MP3 players. As manufacturers continue to press for even greater device miniaturization and reliability, the need for greater accuracy and improved process control of laser-based techniques becomes all the more important. Key to achieving these goals is the ability to make precise in situ measurements of laser output characteristics in real time. For system builders using high-repetition-rate lasers, this requires...Read full article

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