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Akrion Ships Pre-photolithography Clean System

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Akrion Inc., a supplier of semiconductor surface preparation equipment based in Allentown, Pa., announced it recently shipped a Velocity single-wafer cleaning system to a major integrated circuit (IC) device manufacturer in Asia for an advanced pre-photolithography cleaning application. All IC device manufacturing includes several costly photolithography steps, and backside contaminants cause a number of problems for fabs, such as depth of field problems that cause pattern misprints. The Akrion cleaning application reduces the costs of IC device manufacturing by minimizing the...Read full article

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    Published: January 2008
    Glossary
    nano
    An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
    photolithography
    Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer geometric patterns from a photomask or reticle to a photosensitive chemical photoresist on a substrate, typically a silicon wafer. The basic steps of photolithography include: Cleaning the substrate: The substrate, often a silicon wafer, is cleaned to remove any contaminants from its surface. ...
    photonics
    The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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