Amid EUV rollout delays and the spread of 5G and AI, pressure is growing on DUV laser suppliers to lower costs and boost throughput.JAMES SCHLETT, CONTRIBUTING EDITORFour years ago, several leading-edge chip foundries raced to roll out extreme-ultraviolet (EUV) lithography processes for sub-14-nm chips that were intended to succeed the preceding generation of chips. Then, in the summer of 2018, GLOBALFOUNDRIES announced that it was abruptly halting its plans for 7-nm chip development to focus instead on a 14-nm lithography process and a 12-nm leading performance (12LP) platform that used deep-ultraviolet (DUV) lithography. 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