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Carl Zeiss to Supply Tools for Photomask Metrology

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A team of manufacturers led by Sematech of Austin, Texas, has selected Carl Zeiss SMT AG of Oberkochen, Germany, to supply advanced tools for photomask pattern placement metrology. The technology is considered critical in the implementation of 193-nm immersion lithography and of extreme-UV lithography for the 45-nm mode and beyond.Read full article

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    Published: August 2007
    Glossary
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    Businessindustriallight speedmanufacturersmetrologyphotomask pattern placement metrology

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