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Computer Chips Measured Using Optical Scatterfield Technique

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GAITHERSBURG, Md., Dec. 7, 2015 — Using a microscope that combines standard through-the-lens viewing with scatterfield imaging techniques, researchers have accurately measured silicon wafer features 30 times smaller than the wavelength of light. The achievement highlights how scattered light, once disregarded, contains a wealth of accessible optical information. The study was a part of a National Institute of Standards and Technology effort to supply measurement tools that enable the semiconductor industry to continue doubling the number of devices on a chip about every two years, and to help other industries make...Read full article

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    Published: December 2015
    Glossary
    nano
    An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
    scattering
    Change of the spatial distribution of a beam of radiation when it interacts with a surface or a heterogeneous medium, in which process there is no change of wavelength of the radiation.
    Research & TechnologyAmericasNISTMicroscopyTest & MeasurementnanoRichard SilversemiconductorsindustrialImagingscatterfieldscattering

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