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Cymer Gets More Funding for 193nm Research

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SAN DIEGO, June 23 -- Cymer Inc. has received additional funding from International SEMATECH, an Austin, Texas-based semiconductor research consortium, to extend its study of 193nm lithography applications. The companies have been working together for almost two years to sort out problems associated with the production of lasers for lithography applications. Tests done by Cymer to determine the long-term optical damage associated with lasers at 193nm have turned up a previously unknown optical damage mechanism. The latest funding is for further research on the actual characterization of...Read full article

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    Published: June 2000
    industrialNews & Features

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