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BOC Edwards, a supplier of process equipment and materials, announced it has entered into an agreement with Aixtron AG, a manufacturer of MOCVD (metal-organic chemical vapor deposition) process tools, to supply its Zenith III-V integrated pump and abatement system to compound semiconductor customers for arsenide and phosphide MOCVD applications. The Zenith III-V provides treatment of toxic, compound semiconductor process exhaust gases and organometallic precursors in addition to safe handling of high flows of hydrogen.    . . .    Fusion UV Systems Inc., a Gaitherburg, Md.-based supplier of...Read full article

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    Published: February 2005
    AixtronBOC EdwardsenergyFusion UV SystemsindustrialMOCVDNews BriefsPhotonics Tech Briefsprocess equipment and materials

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