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EV Group, SwissLitho Create system to Produce 3D Structures down to Single-Nanometer Scale

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ST. FLORIAN, Austria, Oct. 25, 2017 — Wafer bonding and lithography equipment supplier EV Group and novel nanolithography tools manufacturer SwissLitho AG have announced a joint solution to enable the production of 3D structures down to the single-nanometer scale. Topography image of a nanoimprint stamp of a 3D computer-generated hologram fabricated with the NanoFrazor from SwissLitho. Stamps such as these can be used to replicate 3D structures in high volume using the HERCULES NIL nanoimprint lithography system from EV Group. Courtesy of the EV Group. Initially demonstrated within the "Single Nanometer Manufacturing for...Read full article

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