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Fizeau Interferometers Evaluated Using FlashPhase and Phase-Shift Fringe Analysis

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The FlashPhase software-based technique for interferometric data analysis offers cost and performance benefits. Comparisons are made between its measurement results and those of the phase-shift method with 2-, 4-, 6- and 12-in.-aperture Fizeau interferometers.

Dr. Emmanuel Rabinovich, CVI Laser LLC, and Barbara Carr, Zygo Corp.

Interferometers have been conventional tools for the optical industry and for optical engineering and research for at least three decades. They are used in optical metrology, in the semiconductor industry, for military applications, for laser design and fabrication, for the design of astronomy-related optics and in many other academic and industrial fields. A few traditional methods are used for the analysis of interferometric data. Two of the most popular are static fringe interpretation and mechanical phase-shift acquisition and analysis. Both are suitable for use with instruments that...Read full article

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    Published: August 2006
    Glossary
    astronomy
    The scientific observation of celestial radiation that has reached the vicinity of Earth, and the interpretation of these observations to determine the characteristics of the extraterrestrial bodies and phenomena that have emitted the radiation.
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    astronomyBasic SciencedefenseFeaturesindustrialinterferometersmetrologyoptical engineeringoptical industry

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