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Fourier Transform Spectrometer Measures 193-nm Wavelength Standards

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Daniel S. Burgess

Using a novel Fourier transform spectrometer optimized for ultraviolet wavelengths, Gillian Nave and Craig J. Sansonetti of the National Institute of Standards and Technology (NIST) in Gaithersburg, Md., have measured the spectra of 193-nm reference standards to an uncertainty of better than five parts in 108. They hope that the work, which they reported in the February issue of the Journal of the Optical Society of America and which was funded in part by Lambda Physik, will enable semiconductor manufacturers to produce smaller feature sizes. Nave explained that the index of refraction of...Read full article

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