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Fraunhofer Taps Rudolph for MEMS Inspection

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FLANDERS, N.J., July 26, 2010 — Rudolph Technologies Inc., provider of process characterization equipment and software for wafer fabs and advanced packaging facilities, announced that the Fraunhofer Institute for Silicon Technology (ISIT) in Germany has placed an order for an NSX Series Macro Inspection System for advanced MEMS processing. The system will be installed this summer in the state-of-the-art 200-mm MEMS pilot production line at ISIT. “ISIT evaluated the NSX System along with several other inspection systems for this application,” said Hartmut Seeger, sales manager for Rudolph in Europe....Read full article

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    Published: July 2010
    AmericasBusinessDr. Wolfgang Reinertelectro-optical applicationsEuropeFraunhofer Institute for Silicon TechnologyGermanygreen photonicsHartmut SeegarindustrialISO 9001:2008-certified productionMEMSNew JerseyNSX PlatformNSX series macro inspection systemRudolph TechnologiesSascha MühlmannWafer fabswafer handling

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