Search
Menu
Gentec Electro-Optics Inc   - Measure With Gentec Accuracy LB

Gigaphoton EUV Scanner Operates Stably for 24 Hours

Facebook X LinkedIn Email
Gigaphoton Inc. said it has achieved continuous operation and stable emission with an extreme-ultraviolet (EUV) light source scanner, a laser-produced plasma light source prototype with an output of 108 W and an average energy stability of 0.5 percent. "Our ability to succeed with continuous operation for 24 hours at an output of 108 W indicates that we are close to completing an EUV light source that can operate stably with low running costs and high output, which is what semiconductor manufacturers are looking for," said Hakaru Mizoguchi, vice president and chief technology officer of...Read full article

Related content from Photonics Media



    Articles


    Products


    Photonics Handbook Articles


    White Papers


    Webinars


    Photonics Dictionary Terms


    Media


    Photonics Buyers' Guide Categories


    Companies
    Published: December 2015
    Glossary
    lithography
    Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
    BusinessindustrialAsia-PacificJapanGigaphotonLasersLight SourceslithographysemiconductorsEUVmilestonesTechnology NewsAsia-Pacific Special Section

    We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.