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Gigaphoton EUV Scanner Operates Stably for 24 Hours

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Gigaphoton Inc. said it has achieved continuous operation and stable emission with an extreme-ultraviolet (EUV) light source scanner, a laser-produced plasma light source prototype with an output of 108 W and an average energy stability of 0.5 percent. "Our ability to succeed with continuous operation for 24 hours at an output of 108 W indicates that we are close to completing an EUV light source that can operate stably with low running costs and high output, which is what semiconductor manufacturers are looking for," said Hakaru Mizoguchi, vice president and chief technology officer of...Read full article

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