Search
Menu
Lumencor Inc. - ZIVA Light Engine 3-24 LB

Hidden in Plain Sight: Calcium Fluoride's Intrinsic Birefringence

Facebook X LinkedIn Email
Can lithographers "design out" the intrinsic birefringence of calcium fluoride, or must they find a new material solution for 157-nm lithography?

John H. Burnett, Zachary H. Levine and Eric L. Shirley

For years, lithographers have applied progressively shorter exposure wavelengths to reduce the minimum feature size on integrated circuit chips. However, this approach recently encountered an unexpected and little-known phenomenon: the intrinsic birefringence of cubic crystals, which could undermine the drive to shorter-wavelength lithography. State-of-the-art large-scale chip fabrication uses 248-nm excimer lasers as illumination sources, and pilot lines are testing prototype 193-nm systems. Next in the progression are 157-nm systems, which have been under intense development for several...Read full article

Related content from Photonics Media



    Articles


    Products


    Photonics Handbook Articles


    White Papers


    Webinars


    Photonics Dictionary Terms


    Media


    Photonics Buyers' Guide Categories


    Companies
    Published: December 2001
    chip fabricationFeaturesindustrial

    We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.