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Hybrid TDI Sensors Feature Faster Line Rates and Higher Sensitivity

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New sensor technology is ideal for inspecting flat panel displays, wafers, printed circuit boards and document scanning.

JUNGHYUN NAM AND WOJCIECH MAJEWSKI, VIEWORKS CO. LTD.

Time delay integration (TDI) sensors have been around for almost 40 years now. The concept originated from the days of film cameras, when the idea of opening the shutter and rolling the film at the same speed as the moving target recorded a seemingly static image on the film. With the introduction of CCD imaging technology in the 1970s, the concept was applied to designing the first TDI sensors only a few years later. The sensor structure consists of line scan sensors with a large number of pixels (the largest sensor today has 23k pixels), which are added in parallel. The resulting...Read full article

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