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Rocky Mountain Instruments - Infrared Optics LB

Light Stamp Simplifies Lithography

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Aaron J. Hand

As the semiconductor industry struggles to expand optical lithography's capabilities and decide on the next-generation tool, one research group has come up with an alternative. A team at the IBM Zurich Research Laboratory has developed a relatively simple optical technique that prints features measuring less than half the wavelength of the light source. And it does so without using complex and expensive focusing optics. Light stamps are formed by molding them on a silicon master. Courtesy of IBM Zurich Research Laboratory. The technique uses a "light stamp" that is placed directly on the...Read full article

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    Published: April 1999
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