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Lithography Creates AlGaAs Microdiscs

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Researchers from the University of Hamburg in Germany have fabricated large periodic arrays of AlGaAs semiconductor microdiscs using laser-interference lithography, reactive-ion etching and selective wet-chemical etching of GaAs with a citric-acid-based solution. Traditionally, microdiscs have been produced by electron-beam or optical lithography with an HF-based etching solution. High-resolution scanning electron microscope images revealed the high structural quality of the arrays. As reported in the July 22 issue of Applied Physics Letters, the researchers used temperature-dependent...Read full article

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    Published: October 2002
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