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Microscopy technique could help make 3-D components

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Ashley N. Rice, [email protected]

A technique developed several years ago to improve optical microscopes has now been applied to monitoring the next generation of computer chip circuit components, providing a crucial tool for developing 3-D components. Through-focus scanning optical microscopy (TSOM), developed by researchers at the National Institute of Standards and Technology (NIST), can detect minute differences – as small as 10 nm across, or perhaps smaller – in 3-D shapes of circuit components, which until very recently have been 2-D objects. The technique could address some key industry measurement...Read full article

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