Ashley N. Rice, [email protected] A technique developed several years ago to improve optical microscopes has now been applied to monitoring the next generation of computer chip circuit components, providing a crucial tool for developing 3-D components. Through-focus scanning optical microscopy (TSOM), developed by researchers at the National Institute of Standards and Technology (NIST), can detect minute differences – as small as 10 nm across, or perhaps smaller – in 3-D shapes of circuit components, which until very recently have been 2-D objects. The technique could address some key industry measurement...Read full articleRelated content from Photonics MediaARTICLESNIST Proposes New Definition for Optical WattResearchers at the National Institute of Standards and Technology (NIST) seek to develop a more precise definition for the standard unit of light power, the optical watt. 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