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NanoTech Alliance Tackles EUVL Challenges

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ALBANY, N.Y. & VELDHOVEN, Netherlands, Feb. 9, 2010 – Sematech, a global consortium of semiconductor manufacturers, and ASML, provider of lithography systems for the chip industry based in The Netherlands, announced they have joined forces at the College of Nanoscale Science and Engineering’s (CNSE) Albany NanoTech Complex. As a member of the Lithography program, ASML will team with researchers at Sematech to advance EUV (extreme ultraviolet) lithography technology and its associate infrastructure components, including mask defect reduction, mask metrology infrastructure, source development, resist and materials development, and overall...Read full article

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    Published: February 2010
    Glossary
    lithography
    Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    nano
    An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
    nanotechnology
    The use of atoms, molecules and molecular-scale structures to enhance existing technology and develop new materials and devices. The goal of this technology is to manipulate atomic and molecular particles to create devices that are thousands of times smaller and faster than those of the current microtechnologies.
    ASMLBusinessCNSECollege of Nanoscale Science and Engineeringextreme ultraviolet lithographyindustrialJohn Warlaumontlithographymask defect reductionsmask metrologymetrologyMoores LawnanonanotechnanotechnologyNetherlandsNew YorkRichard BrillaRon KoolSematechsemiconductorsUAlbany

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