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ORA Awarded International Sematech Contract to Advance 157 nm Microlithography System Modeling

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International Sematech has contracted with Optical Research Associates (ORA) to extend the capabilities of their Code V optical design software to support analysis of advanced optical systems for 157 nm microlithography. Specifically, this will involve the development of novel algorithms for the modeling of birefringent crystalline materials. The existing capabilities in Code V allow the simulation of uniaxial birefringent crystals and symmetric, stress-induced birefringence. This contract calls for ORA to extend these capabilities to accurately simulate the inherent behavior of transmissive...Read full article

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    Published: July 2001
    CommunicationsindustrialNews & Features

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