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Obert R. Wood II and Akiyoshi Suzuki Named 2019 Frits Zernike Award Winners

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BELLINGHAM, Wash., and SAN JOSE, Calif., March 25, 2019 — Obert R. Wood II and Akiyoshi Suzuki have been recognized by SPIE for outstanding accomplishments in microlithographic technology, especially in furthering the development of semiconductor lithographic imaging solutions. They each received this year’s Frits Zernike Award. This year, the award has dual recipients with Wood being recognized for his pioneering contributions to extreme-ultraviolet (EUV) lithography, and Suzuki being honored in recognition of his multiple innovations with lithography exposure tools. Wood is a principal member of the technical staff in the...Read full article

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