BELLINGHAM, Wash., and SAN JOSE, Calif., March 25, 2019 — Obert R. Wood II and Akiyoshi Suzuki have been recognized by SPIE for outstanding accomplishments in microlithographic technology, especially in furthering the development of semiconductor lithographic imaging solutions. They each received this year’s Frits Zernike Award. This year, the award has dual recipients with Wood being recognized for his pioneering contributions to extreme-ultraviolet (EUV) lithography, and Suzuki being honored in recognition of his multiple innovations with lithography exposure tools. Wood is a principal member of the technical staff in the...Read full articleRelated content from Photonics MediaARTICLES2021 Prism Awards Honor Photonics InnovationsEarlier today during the Prism Awards, SPIE, the international society for optics and photonics, and Photonics Media recognized top optics and photonics products on the market. 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