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Optical Profiler Technology Enables High-Magnification Measurement Through Transmissive Materials

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Developed for microelectromechanical systems testing, the through-transmissive-media technique has potential applications in fields from materials science to the life sciences.

Stephen Hopkins, Veeco Instruments Inc.

For decades, high-performance optical profilers have been evolving to adapt white-light interferometry to research and production applications in materials science, semiconductors, optics and the biological sciences. However, a limitation that remained largely unconquered by profiler technology was an inability to characterize through cover glass, protective packaging, environmental chamber windows or other dispersive materials. When attempting to measure through transparent layers, the resolution degraded with any increase in magnification. Figure 1. Images of a 20-μm-pitch...Read full article

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    Published: December 2005
    CommunicationsFeatureshigh-performance optical profilersindustrialMaterialsMicroscopySensors & Detectorswhite-light interferometry

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