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Piezoresistive Sensors Facilitate High-Speed Nanopositioning

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Subangstrom-level noise and nonlinearities better than 0.05 percent make them strong competitors to capacitance sensors.

Dr. William O'Brien, Mad City Labs Inc.

Science and industry requirements are fueling demand for smaller and higher-speed nanopositioners. Capacitance sensors, which are used in many nanopositioners, may pose problems when used with either miniaturized or faster nanopositioning systems, and they face growing competition from modern piezoresistive sensors, in part because of their subangstrom noise levels and nonlinearities better than 0.05 percent. A nanopositioner consists of three primary components: the guidance mechanism, the actuator and the position sensor. For applications that require subnanometer precision, many...Read full article

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