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Plasma’s Potential for Photolithography Pursued

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SEATTLE, July 3, 2012 — Work over the past decade to harness the energy-generating mechanism of the sun has now yielded bright high-energy light needed to etch smaller microchips. The microchip industry now uses 193-nm UV light, which cannot etch circuits any smaller than those currently being made. The future standard for making microchips, the industry has determined, is 13.5-nm light. To create such extreme-UV light, high-temperature, electrically charged gases called plasma are necessary; until now, however, scientists have struggled to generate enough power with the extreme-UV light sources that exist. ...Read full article

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    Photonics.com
    Jul 2012
    GLOSSARY
    electronics
    That branch of science involved in the study and utilization of the motion, emissions and behaviors of currents of electrical energy flowing through gases, vacuums, semiconductors and conductors, not to be confused with electrics, which deals primarily with the conduction of large currents of electricity through metals.
    photonics
    The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
    plasma
    A gas made up of electrons and ions.
    AmericasCenter for CommercializationelectronicsenergyEUVextreme ultravioletfusion energyhigh-energy lightImagingLasersmicrochip etchingmicrochipsnanophotonicsplasmaResearch & TechnologyUniversity of WashingtonUri ShumlakWashingtonWashington Research FoundationZplasma

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