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Plasma’s potential for photolithography pursued

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Work over the past decade to harness the energy-generating mechanism of the sun has yielded bright high-energy light needed to etch smaller microchips. The microchip industry now uses 193-nm UV light, which cannot etch circuits any smaller than those currently being made. The future standard for making microchips, the industry has determined, is 13.5-nm light. Creating such extreme-UV light requires high-temperature, electrically charged gases called plasma, but scientists have struggled to generate enough power with existing extreme-UV light sources. “Over the past decade,...Read full article

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    Published: September 2012
    Glossary
    electronics
    That branch of science involved in the study and utilization of the motion, emissions and behaviors of currents of electrical energy flowing through gases, vacuums, semiconductors and conductors, not to be confused with electrics, which deals primarily with the conduction of large currents of electricity through metals.
    extreme ultraviolet
    Extreme ultraviolet (EUV) refers to a specific range of electromagnetic radiation in the ultraviolet part of the spectrum. EUV radiation has wavelengths between 10 and 124 nanometers, which corresponds to frequencies in the range of approximately 2.5 petahertz to 30 exahertz. This range is shorter in wavelength and higher in frequency compared to the far-ultraviolet and vacuum ultraviolet regions. Key points about EUV include: Source: EUV radiation is produced by extremely hot and energized...
    nano
    An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
    photonics
    The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
    plasma
    A gas made up of electrons and ions.
    AmericasCenter for CommercializationelectronicsenergyEUVextreme ultravioletfusion energyhigh-energy lightImagingindustrialmicrochip etchingmicrochipsnanophotonicsplasmaResearch & TechnologyTech PulseUniversity of WashingtonUri ShumlakWashingtonWashington Research FoundationZplasmaLasers

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