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Polymer Microlenses Added to Micropixelated UV LED

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Daniel S. Burgess

Proposed applications of LEDs having micron-scale pixel elements include microdisplays and biological and chemical sensors. Now scientists at the University of Strathclyde in Glasgow, UK, have integrated a microlens array and a matrix-addressable, 368-nm micropixelated LED to demonstrate the suitability of such devices for maskless photolithography, in which the programmable emission pattern of the exposure system would produce the desired pattern on a photoresist. In previous experiments with a bare-chip AlInGaN LED with a 64 × 64-pixel structure, the scientists found that the beam...Read full article

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    Published: July 2005
    chemical sensorsConsumerFeaturesindustrialmicrodisplaysMicroscopySensors & DetectorsLEDs

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