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Producing Patterns on a Curve

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Moving both laser and worktable enhances microlithography technique.

Hank Hogan

In the past, researchers wanting to perform lithographic microfabrication on a nonflat lens or other optical surface have been thrown a curve — literally. Standard lithographic technology cannot do the job. Investigators, therefore, were restricted largely to planar surfaces, which can be less than...Read full article

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