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SUSS MicroTec Receives Cluster Tool Order

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MUNICH, Germany, Feb. 25 -- SUSS MicroTec said it has received its first lithography cluster order from a major optoelectronic semiconductor manufacturer. The lithography cluster is used in volume production of components for a variety of compound semiconductor applications, including monolithic microwaves ICs, semiconductor lasers, LEDs and infrared sensors.Read full article

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    Published: February 2002
    industrialNews & FeaturesSensors & Detectors

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