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Toshiba Develops 32nm CMOS Platform Tech

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Toshiba Corp. of Tokyo has announced a cost-effective 32-nm CMOS platform technology that offers higher density and improved performance while halving the cost per function from 45-nm processes. The platform was created by applying single-exposure lithography and gate-first metal gate/high-K process technology. It enables a 0.124 µm2 SRAM cell and a gate density of 3650 gate/mm2. The platform is based on a 32-nm process developed jointly with NEC Electronics Corp. The strict design rule in the 32-nm generation was originally seen as requiring dual exposure technology in the lithography...Read full article

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    Published: December 2008
    Glossary
    cell
    1. A single unit in a device for changing radiant energy to electrical energy or for controlling current flow in a circuit. 2. A single unit in a device whose resistance varies with radiant energy. 3. A single unit of a battery, primary or secondary, for converting chemical energy into electrical energy. 4. A simple unit of storage in a computer. 5. A limited region of space. 6. Part of a lens barrel holding one or more lenses.
    illumination
    The general term for the application of light to a subject. It should not be used in place of the specific quantity illuminance.
    lithography
    Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
    photonics
    The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
    32 nm45 nmArFCellCMOSEmploymentgate/mm2illuminationindustriallithographyNEC ElectronicsNews BriefsphotonicsPhotonics Tech BriefsSRAMToshiba

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