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Tracking Nanoposition Advances

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Parallel kinematics, active trajectory control, vibration suppression and tracking-error elimination promote precision.

Stefan Vorndran

What works in the microworld very often doesn’t work in nanopositioning applications such as nano-imprinting, scanning microscopy, microlithography and automated alignment. End users will often need to rethink positioning strategies, including the way they define basic device parameters such as resolution. When the term “nanopositioning” was coined, some companies advertised open-loop, stepper-driven leadscrew devices as nanopositioners. Although such simple drives have since been replaced by more sophisticated systems, how some companies define accuracy and resolution...Read full article

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    Published: March 2003
    Glossary
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    microlithography
    A technique for producing micron-size structures on surfaces by using short-wavelength light or electron beams.
    automated alignmentBasic ScienceCommunicationsFeaturesindustrialmetrologymicrolithographyMicroscopynano-imprintingnanopositioning applicationsscanning microscopySensors & Detectors

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