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Trends in Deep-UV Excimer Light for Photolithography

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Brian Klene and Daniel J. Colon III

Light source manufacturers move away from the single gas discharge chamber to a new design that meets the increasing demands of semiconductor processing. The use of deep-UV excimer light sources in semiconductor chip manufacturing has grown dramatically in the last five years. More than half of the lithography exposure systems shipped since 2000 employ these devices as illumination sources. While their application to semiconductor processing has enabled the industry to pattern microelectronic circuits at 0.25 μm and below, a number of developing trends will significantly affect their use...Read full article

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    Published: January 2003
    Glossary
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    deep-UV excimer light sourcesFeaturesillumination sourcesindustrialmetrologysemiconductor chip manufacturing

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