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Ultratech Wins Order from Korean Wafer Manufacturer

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SAN JOSE, Calif., June 18 -- Ultratech Stepper Inc. has received a million-dollar order for the Saturn I stepper system from a leading Korean semiconductor manufacturer. The Saturn family of steppers is Ultratech's most advanced mix-and-match lithography system. The Saturn I offers resolution down to 0.65 µm and a large field size of 22 mm x 44 mm, and can be matched to a 5X reduction stepper field or the new step-and-scan system field. It has a throughput of more than 80 eight-inch wafers per hour, and can provide pattern recognition features on existing products without requiring...Read full article

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    Published: June 1999
    industrialNews & Features

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