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Metalens Cuts Complexities for Semiconductor Manufacturing

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Rice University researchers have developed a metalens that transforms incoming longwave UV light (UVA) into a focused output of vacuum UV (VUV) radiation. VUV is used in semiconductor manufacturing, photochemistry, and materials science. Historically it has been costly to work with, in part because it is absorbed by almost all types of glass used to make conventional lenses. The team led by Naomi Halas, the Stanley C. Moore Professor in Electrical and Computer Engineering and a professor of biomedical engineering, chemistry, and physics at Rice University, developed a metalens that...Read full article

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