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Riber, Imec Extend Collaboration

Photonics Spectra
Jun 2012
Molecular beam epitaxy supplier Riber SA of Bezons, France, and R&D company imec of Louvain, Belgium, will continue work on epitaxy process technologies for next-generation III-V CMOS devices. In the new project, Riber’s 300-mm ultrahigh-vacuum (UHV) chamber, equipped with in situ tools for surface analysis and clustered with 300-mm silicon CMOS production equipment, will be evaluated for the production of CMOS devices based on high-mobility germanium and III-V channels. Through the collaboration, imec said it can integrate the power of UHV systems into state-of-the-art semiconductor production equipment on large-diameter wafers.

A crystalline semiconductor material that transmits in the infrared.
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
ALDatomic layer depositionBasic ScienceBelgiumBusinesschemical vapor depositionCMOSCMOS devicescompound semiconductorsCVDepitaxy process technologiesEuropeFranceFrédérick Goutardgate stack passivationgermaniumHans LebonIII-V CMOSimagingIMEClight speedMBEmobile phonesmolecular beam epitaxyphotonicsRibersilicon CMOSsurface analysis tools

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