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Rudolph Receives Multiple-System Order

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Rudolph Technologies Inc. of Flanders, N.J., has been awarded a multiple-system order from a US semiconductor manufacturer for its all-surface advanced macrodefect-detection system. The system consists of modules for front-side inspection, back-side inspection and a wafer edge inspection system. The modules allow automatic detection, classification and correlation of defects in semiconductor wafers for deposition, lithography, etch and chemical mechanical planarization applications.


Photonics Spectra
Jun 2006
Businessindustriallight speed

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