Search Menu
Photonics Media Photonics Marketplace Photonics Spectra BioPhotonics EuroPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook

Rudolph Wins Patent Suit

Facebook Twitter LinkedIn Email Comments
Rudolph Technologies Inc. of Minneapolis has received a favorable verdict in its patent infringement suit against Israeli manufacturer Camtek Ltd. concerning the former’s proprietary continuous-scan wafer inspection technology. The jury determined that all models of Camtek’s Falcon inspection system infringe Rudolph’s US Patent No. 6,826,298 for an automated wafer defect inspection system and a process for performing such inspections, which covers continuous wafer inspections using strobing lights. The technology is employed in the inspection tools used by Rudolph and its subsidiary August Technology Corp. In awarding approximately $6.8 million to Rudolph, the jury also rejected Camtek’s arguments that Rudolph’s patent is invalid. Rudolph said it will continue to pursue intellectual property protection for its proprietary continuous-scan wafer inspection systems outside the US.
Mar 2009
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
298826Automated Wafer Defect Inspection SystemCamtekcontinuous scan wafer inspectionFalconNews BriefsphotonicsPhotonics Tech BriefsRudolph Technologiesstrobing illuminationUS Patent No. 6

back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2020 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, [email protected]

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.