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Wafers Grow; Features Shrink

Herbert Kaplan and Kathleen G. Tatterson

A major change in the semiconductor industry is prompting considerable growth in the demand for instrumentation and manufcturing tools. Wafers are getting larger, and lithography design improvements are narrowing features' the line width and spacing. These efforts challenge the photonics community with the need to create and measure products with increasingly finer resolution on increasingly larger areas.

Photonics Spectra
Aug 1997

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