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Therma-Wave Wins Order for Metrology Systems

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FREMONT, Calif., March 15 -- Therma-Wave, Inc. has received an order from the Shipley Co. of Marlborough, Mass., for two Opti-Probe 5000 advanced metrology systems. Shipley will use the systems across its advanced research and production technology areas for the optical characterization of leading-edge 248 nm, 193 nm and next-generation lithography materials.

Published: March 1999
Glossary
metrology
Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
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