Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
Email Facebook Twitter Google+ LinkedIn Comments

Ultratech Chooses TMC Vibration Control System
Feb 2003
PEABODY, Mass., Feb. 7 -- Technical Manufacturing Corp. (TMC) announced that Ultratech Stepper Inc. has chosen its Electro-Damp II Active Vibration Control System as the new platform for its 200- and 300-mm Saturn Spectrum and Titan Wafer Stepper family.

Ultratech plans to incorporate Electro-Damp II into its steppers for semiconductor, advanced packaging, microlithography, nanotechnology and optical networking applications.

Each patented Electro-Damp II system will include TMC’s DC-2000 digital controller, noncontacting electronic valving system, Gimbal Piston isolator and high-force linear motors. The isolation system will be incorporated into a highly engineered frame, also made by TMC, which will be the foundation of the tool.

For more information, visit:

Active Vibration Control SystemCommunicationsElectro-DampindustrialNews & FeaturesTechnical ManufacturingTmUltratechUltratech Stepper

Terms & Conditions Privacy Policy About Us Contact Us
back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2018 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA,

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.