Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics Spectra BioPhotonics EuroPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook
More News

Ultratech Stepper Orders Cymer Laser

Facebook Twitter LinkedIn Email Comments
SAN DIEGO, Nov. 22 -- Cymer Inc. has received an order for its ELX-6500F2 fluorine laser from Ultratech Stepper Inc. of San Jose, Calif. According to Cymer, the fluorine F2 laser is the first 157-nm laser to offer a repetition rate of 1000 Hz, which makes possible the extension of optical lithography for devices with feature sizes below 100 nm.
Ultratech will integrate Cymer's ELX-6500F2 into its small field XLS 157-nm microstepper lithography tool for next-generation lithography process development applications. Cymber expects to ship the laser to Ultratech's facility in Wilmington, Mass. in the first quarter of 2000.

Photonics.com
Nov 1999
industrialNews & Features

Comments
back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2020 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, info@photonics.com

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.