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Veeco Wins $3 Million Metrology Orders

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WOODBURY, NY, Jan. 16 -- Veeco Instruments Inc. has received approximately $3 million in orders for its Oasis 3000 defect inspection system from three leading manufacturers of thin film magnetic heads.

The Oasis 3000 DUV (deep ultraviolet) provides automatic identification and characterization of defects and automatic measurement of pole tip critical dimensions to 100nm. The system is used in current 40 GB programs and will be required for future 60 GB applications. The Oasis provides 248 nm DUV illumination and imaging to measure writer widths to 100 nm and to quantify other critical dimension measurements such as writer height and shield thickness with nanometer accuracy.
Jan 2002
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