Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
Email Facebook Twitter Google+ LinkedIn Comments

Veeco Wins Orders for Automated Semiconductor Tools
Jan 2000
PLAINVIEW, N.Y., Jan. 11 -- Veeco Instruments Inc. has received multiple-unit orders valued at $4.7 million for its Dimension 9000TR atomic force microscope and its recently introduced chemical-mechanical polishing metrology tool, the Dimension Vx Atomic Force Profiler (AFP). Semiconductor manufacturers in Europe, the US, and Asia/Pacific Rim placed the orders for the semiconductor production metrology tools, which are manufactured at Veeco Metrology Group's Santa Barbara facility.
Veeco's Dimension 9000TR measures STI, RC1, RC2, RR and other trench structures in logic and memory manufacturing. The company said the device allows automation of on-line process monitoring by offering self-calibration, automatic tip evaluation/replacement, wafer handling, pattern recognition, and recipe-driven automated measurement sequences and data analysis. Veeco described its Dimension Vx AFP as combining AFM resolution with the long-scanning -- up to 100 mm -- capabilities of a stylus profiler. The Vx AFP was designed for non-destructive measurement of dishing, erosion, and recess for line widths of 0.13 µm and below. Veeco said that both tools are available in 200-mm and 300-mm versions.

The science of measurement, particularly of lengths and angles.
Basic ScienceindustrialmetrologyMicroscopyNews & Features

Terms & Conditions Privacy Policy About Us Contact Us
back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2019 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA,

Photonics Media, Laurin Publishing
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.