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Virginia Tech Signs Contract and Research Cooperation Agreement for an Aixtron 200/4 RF-S GAN System
Jul 2001
AACHEN, Germany, July 3 -- Virginia Tech and Aixtron announced that Virginia Tech purchased a new Aixtron gallium nitride MOCVD system. Virginia Tech had decided to purchase the Aixtron 200/4 RF-S reactor due to the quality and versatility of the Nitrides deposited in the reactor. Based on the AIX 200/4 reactor series, this stainless steel version offers a high flexibility in the choice of in-situ measurement methods.
    "The group will focus on the growth mechanisms of Group III Nitride alloys and heterostructures and on the application of these materials in optoelectronic devices," said Professor Louis Guido, head of the GaN team within the departments of Materials Science and Engineering and Electrical and Computer Engineering at Virginia Tech. "For this purpose the AIX 200/4RF-S is the ideal MOCVD system which ensures high reliability and flexibility, a prerequisite for the growth of a variety of different materials. The consequent design of the reactor for all kinds of in-situ monitoring will allow us to combine the growth of highest quality nitride based structures with sophisticated optical investigations inside the reactor."

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