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X-Ray Microcalorimeter Developed for Improved Materials Analysis

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An x-ray microcalorimeter developed by the National Institute of Standards and Technology could improve materials analysis in the semiconductor industry. The device, compatible with commercially available scanning electron microscopes, can achieve an x-ray resolution of 10 eV at a count rate of 100 photons per second -- 10 times better than current technology, according to the agency. This ability would allow semiconductor manufacturers to accurately identify tungsten silicide for integrated circuits.

Photonics Spectra
Feb 1997
materialsMicroscopyResearch & TechnologyTech Pulse

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