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Zygo Delivers MicroLUPI Systems to Digital Optics

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MIDDLEFIELD, Conn., March 1 -- Zygo Corp. said that it has delivered multiple MicroLUPI metrology systems to Digital Optics Corp., a manufacturer of photonic chips for the telecom and datacom industries. The system provides automated, rapid, and precise 3-D surface shape analysis of discrete or wafer-based micro-optic components.
    "Zygo's MicroLUPI system provides us with critical feedback necessary to improve process yields and ensure product quality," commented William Francis, vice president of operations at Digital Optics.

Photonics.com
Mar 2001
GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
CommunicationsmetrologyNews & FeaturesopticsWafers

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