Photonics Dictionary

Also called DLIP, a high-speed, high-resolution processing technique that uses high-power, pulsed laser systems to directly ablate micro- and nanoperiodic structures with different features on large...

An electron-beam lithography (EBL) system is a sophisticated nanofabrication tool used in the semiconductor industry and research laboratories to pattern extremely fine features with sub-micrometer...

In the context of thin film deposition processes such as evaporation or sputtering, masks are used to selectively deposit material onto substrates, creating patterns or structures with precise...

Micro-optics refers to the design, fabrication, and application of optical components and systems at a microscale level. These components are miniaturized optical elements that manipulate light at a...

In optics and photolithography, a phase mask refers to a device that modifies the phase of light waves passing through it. The phase mask is used to control the spatial distribution of the light's...

A photomask, also known simply as a mask or reticle, is a key component in the photolithography process used in semiconductor manufacturing and other areas of microfabrication. It is a high-precision...

Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS)....