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Diffractive Optics

About Focuslight Technologies Inc.

  • Type: Other
  • Applications: Industrial, Scientific Research

- Fused silica, silicon
- 8" wafer scale
- Binary, 8-level, 16-level
- 0.5 μm Minimum feature size
- < 70 nm overlay accuracy
- Diffraction efficiency up to 98 %
- 190 nm to 5 μm wavelength range

Diffractive Optics

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