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Greenlight Optics LLC - Photonics West Booth 1-26 LB
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Excimer Cavity Rear Mirrors

About Lambda Research Optics Inc. (USA)

  • Type: Mirrors
  • Diameter / Dimension: 12.7mm - 50.8mm
  • Mirror Category: Flat Mirror
  • Surface Quality: < 20/10
  • Surface Flatness: < λ/10 @ 633nm

There are 193, 248m, and 308 nm excimer lasers. Applications are in microlithography, mircro-manufacturing and medical devices. At these wavelengths it is recommended to use CaF2 or MgF2 substrates for intracavity transmissive optical elements. Excimer laser cavity coatings are designed for acid/fluorine resistance.


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