About Buhler Inc., Business Area Leybold Optics- Type: Coating Systems
- Applications: Biomedical/Medical, Industrial, Scientific Research
The STARpro reactive single-magnetron sputtering system covers a wide range of applications through the use of Si3N4 and SiO2 layer stacks. Compact and easy to install, ideal for small-batch optical filter production, rapid prototyping, and R&D.
- Versatile coating system for small-batch production
- Spot-on accuracy and high reproducibility
- Extremely easy to install and operate
- Direct on wafer sputtering
- Optical monitoring with automated test slight exchange
- SECS/GEM Interface